High Vacuum Stainless Steel Cavity Plasma Sputtering and 

Evaporation Two-in-one Coater

Introduction

Plasma sputtering and evaporation two-in-one coater is equipped with DC sputtering target and thermal evaporation component, which can be used not only for plasma sputtering of metal films, but also for evaporation of carbon or other metal monomer films. The instrument components are highly integrated to achieve two coating functions in the same chamber; the coating instrument uses 304 stainless steel chamber as the vacuum chamber, and the coating process is fully visible. The instrument is equipped with a bipolar rotary vane vacuum pump, which can quickly reach the vacuum level of 1.0E-3Pa and the ultimate vacuum level of 1.0E-5Pa, which can meet the vacuum environment required for most evaporation coating experiments and dipole sputtering experiments. This instrument is small in size, space-saving, can be placed on the test bench, a multi-purpose machine, outstanding cost performance, very suitable for universities and research institutions to use.

Application

Scanning electron microscope sample surface spraying gold, evaporated gold spraying carbon and other operations, as well as the production of non-conductor materials test electrodes, etc.

Technical parameters