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Email : gilia@inthelaboratory.com
Three Targets Plasma Sputtering Coater Coating Machine
Introduction
The three-target plasma sputter coater is a cost-effective plasma sputter coater developed by our company. The plasma sputtering target is of standard size of 2 inches, and customers can choose different configurations of 1~3 targets according to their needs to meet the different experimental requirements of plating single-layer films or multi-layer films of various materials. The instrument is equipped with 150W DC high voltage power supply, which can be used for metal sputtering coating, especially for gold, silver, copper and other precious metals. The coating instrument is equipped with a venting interface, which can be fed with protective gas. The instrument is controlled by touch screen, which is simple, intuitive and easy to use. It can realize the operation of coating start/stop, switching target position, baffle rotation, etc. with one key, which is very suitable for laboratory purchase.
The standard equipment of this coater is bipolar rotary vane vacuum pump, which has the advantages of small size, fast vacuum and simple operation.
Application
It can be used for metal sputtering coating, especially suitable for gold, silver, copper and other metals.
Technical parameters
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Three-target plasma sputter coater |
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Sample Stage
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Size |
φ138mm |
Temperature control accuracy |
±1℃ |
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Heating Temperature |
Max.500℃ |
Rotational speed |
1-20rpm adjustable |
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DC sputtering head |
Quantity |
2"×1 （1~3 targets optional） |
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Vacuum chamber
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Cavity size |
φ180mm × 150mm |
Viewing window |
Omnidirectional transparency |
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Chamber material |
High purity quartz |
Opening method |
Top flip-up type |
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Vacuum System
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Mechanical Pump |
Rotary Vane Pumps |
Pumping interface |
KF16 |
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Vacuum measurement |
Resistance Gauge |
Exhaust port |
KF16 |
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Ultimate vacuum |
1.0E-1Pa |
Power supply |
AC 220V 50/60Hz |
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Pumping rate |
Rotary vane pump: 1.1L/S |
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Power Supply Configuration |
Quantity |
DC power supply x1 |
Maximum output power |
150W |
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Other |
Power supply voltage |
AC220V,50Hz |
Overall dimension |
360mm × 300mm × 470mm |
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Power of the whole machine |
800W |
Overall weight |
40kg |
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IPv6 network supported 