Small High Vacuum Magnetron Sputtering and Evaporation Coater with PLC Touch Screen Control 

I. Equipment overview

1. Applicable: universities and colleges, research institutes and enterprises for scientific research and small batch preparation of new thin film materials.

2. Product features/uses:

► Equipment can be used for both sputtering/evaporation; small footprint, inexpensive, stable performance, low cost of use and maintenance;

► It can be used to prepare single-layer and multi-layer metal films, dielectric films, magnetic films, sensor films and heat-resistant alloy films, hard films, corrosion-resistant films, etc;

► Coating examples: silver, aluminum, copper, nickel, chromium, nickel-chromium alloy, titanium oxide, ITO, silicon dioxide, etc;

► Single-target sputtering, multi-target sequential sputtering, common sputtering and other functions.

II. Technical parameters