Tel : +86-592-3926659
Email : gilia@inthelaboratory.com
Perovskite Solar Cell Lab Line Vacuum Desktop Magnetron Sputtering Instrument with 150X120mm Quartz Chamber
Key Features：
1. 4.3-inch full-color touch screen design, LCD screen real-time vacuum degree display, real-time display of sputtering current, voltage, vacuum degree and other parameters.
2. Suitable for various metal targets, with a diameter of 50mm and a thickness of 1-2mm. It is convenient to replace the target. The formula is saved by default for next operation.
3. It can pass various inert gases, nitrogen, argon, etc., and the air intake volume is adjustable.
Magnetron Sputtering Specifications （SC-SU-I）
|
Size of quartz chamber |
150X120MM |
|
Sample size |
70mm |
|
Sputtering size |
50mm |
|
Maximum vacuum |
5pa |
|
Gas usable |
Inert gases such as hydrogen, nitrogen, etc. |
|
Maximum sputtering speed |
8nm/min |
|
Power |
200W |
|
Dimension |
360(W)X310(D)X150mm(H) |
|
Relative humidity |
< 85% |
|
Ambient temperature |
0-40℃ |
|
Warranty |
1 year |
IPv6 network supported 