Laboratory Resistance Evaporation and Glove Box Composite
Coater Machine
I. Product Overview
1、Applicable: universities and colleges, research institutes and enterprises for scientific research and small batch preparation of new thin film materials.
2、Product features/uses:
► Equipment integrated design, small footprint, favorable price, stable performance and low cost of use and maintenance;
► Equipment equipped with 4-6 groups of evaporation sources, compatible with organic evaporation and inorganic evaporation, multiple co-evaporation to obtain composite film/split evaporation to obtain multi-layer film, powerful and stable performance;
► Suitable for laboratory preparation of metal monolithic film, organic film, also can be used for production line pre-process test, etc.;
► Suitable for evaporation coating and glove box environment organic integration, to achieve evaporation, packaging, testing and other processes seamlessly, widely used in calcium titanite solar cells / OPV organic solar cells and OLED thin film and other research systems, etc.
II. Technical parameters
Model |
ZHDS400 |
Coating method |
Multi-source evaporation coating |
Vacuum chamber structure |
Square box type front and back door; equipped with glove box |
Vacuum chamber size |
L400×W440×H450mm |
Heating temperature |
Room temperature~300℃ |
Rotating substrate table |
120mm×120mm |
Substrate table lift |
Manually adjustable lifting height 0~80mm |
Film thickness non-uniformity |
≤±5.0% |
Evaporation source |
2 groups of metal source, 2~4 groups of organic source |
Control method |
PLC/PC automatic control system is optional |
Floor space |
Host L1100×W780×H1800mm, glove box size customized |
Total power |
≥10KW |