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Lab High Vacuum Magnetron Dual-head Sputtering Coater with Rotary Vacuum Pump

Contact Person:Gilia Ding


Email: gilia@inthelaboratory.com

Tel:+86 177 5900 4070
Telephone:+86-177-59004070
Whatsapp: +86 177 5900 4070
Wechat:Dingqiuna



  • Item no.:

    LITH-650MHT
  • Payment:

    L/C, T/T, Western Union, Credit Cards, Paypal
  • Lead Time:

    7 days
  • Compliance:

    CE Certified
  • Warranty:

    Two years limited standard warranty
  • Product Detail

Lab High Vacuum Magnetron Dual-head Sputtering Coater with Rotary Vacuum Pump

   


Technical Specifications

Vacuum Pump Set

(Oil required) Rotary Vacuum Pump + (Oil free) Turbo Molecular Pump set

Rotary Pumping Speed

50 Hz : 16m3/h (4.4 L/s) / 60 Hz : 19.2m /h (5.2 L/s)

Molecular Pumping Speed

300 L/s

Vacuum Limit

5 x10-5Pa

Working Pressure

0.5-5 Pa

Vacuuming Time

>10 Min(10-3Pa)

Vacuum Measure

Measuring range from atmosphere to 10-6Pa

Gas Control

Gas Flow Controller

Chamber Size

φ260*200mm (height) Metal

Magnetron Target Source

Target sizeφ50*3mm (Cu) / Target source: Weak Magnetic Substance / Materials

Operation Method

Instruction Manual

Weight / Size

100kg / 610mm length*420mm wide*490mm high

Power Supply

AC 110V 60Hz or AC 220V 50Hz

Power Consumption

<3000W

Cooling Method

Air Cooling(Pump) + Water Cooling(Sputtering Target)

Warranty

One year limited warranty with lifetime product support




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