Vacuum Pump Set

(Oil required) Rotary Vacuum Pump + (Oil free) Turbo Molecular Pump set

Rotary Pumping Speed

50 Hz : 16m³/h (4.4 L/s) / 60 Hz : 19.2m /h (5.2 L/s)

Molecular Pumping Speed

300 L/s

Vacuum Limit

5 x10^-5Pa

Working Pressure

0.5-5 Pa

Vacuuming Time

>10 Min(10^-3Pa)

Vacuum Measure

Measuring range from atmosphere to 10^-6Pa

Gas Control

Gas Flow Controller

Chamber Size

φ260*200mm (height) Metal

Magnetron Target Source

Target sizeφ50*3mm (Cu) / Target source: Weak Magnetic Substance / Materials

Operation Method

Instruction Manual

Weight / Size

100kg / 610mm length*420mm wide*490mm high

Power Supply

AC 110V 60Hz or AC 220V 50Hz

Power Consumption

<3000W

Cooling Method

Air Cooling(Pump) + Water Cooling(Sputtering Target)