Tel : +86-592-3926659
Email : gilia@inthelaboratory.com
1200C Single Temperature Zone Quartz Tube CVD Furnace with Five Channels Gas Mixed System
The equipment introduction: The series of XY vacuum tube furnace use high pure alumina or quart tube as furnace chamber. Precise and advanced auto temperature controller, high temperature accuracy,easy operation,excellent heat-insulation effect, symmetrical temperature uniform, XY tube furnace are widely used in the labs of university and Research Institutions, also used in factory for production.
Product Description: This equipment is a fixed single temperature zone tube furnace system, which includes D80x350mm single temperature zone tube furnace, Five Float flow gas mixed system,10-2Pa vacuum diffusion pump unit
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Technical Parameters |
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Max.temperature： |
1200C |
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Working temperature： |
≤1100C |
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Tube material： |
Quartz tube |
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Tube size： |
Diameter：150mm,heating zone length：440mm |
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Voltage： |
220V/50HZ |
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Heating element： |
Resistance wire |
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Thermocouple： |
K type |
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Temperature accuracy： |
±1℃ |
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Heating rate： |
≤10℃/min |
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Temperature control： |
PID control and self-tuning adjustment,intelligent 30-segment programmable control, with over-temperature and break-off alarm function |
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Inlet gas/Atmosphere |
It can be filled with various protective or destructive gases,Inert gases, mixed gases, nitrogen, oxygen, etc |
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Gas control |
The air inlet can be set up 1 or more air intakes, each air inlet is provided with a needle valve, connected with a vacuum gauge. The air outlet is connected with one air outlet, and all holes are equipped with needle valves. Equipped with a vacuum pump. |
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Appearance design |
The electric furnace adopts humanized design, beautiful and easy to operate, and the outer layer of paint is sprayed with high temperature baking technology. High temperature resistance, oxidation resistance, acid and alkali resistance. Color selection is aging resistant tone, will not cause the appearance color fade due to a long time of use. |
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Furnace Chamber material |
Adopt the most advanced light alumina ceramic fiber in the world, with excellent thermal insulation effect, light weight, high temperature resistance, cold and heat resistance, no crack, no crystallization, no slag, do not worry about pollution of the fired products. The energy saving effect is 60-80% of the old electric furnace. |
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Furnace shell structure |
Electric furnace shell adopts double layer forced air cooling structure, so that the electric furnace works at the highest temperature and the external temperature of the shell is close to room temperature, so as to avoid accidental injury. |
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Sealing way |
Adopt 304 stainless steel flange, with easy loading and unloading, oxidation resistance, acid and alkali resistance, double seal, ensure the sealing |
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Five channels gas mixed system |
Five gas channels float flowmeter Pressure gauge |
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Vacuum system |
Vacuum pump: Diffusion pump unit Max.vacuum degree:10-4mbar KF25 quick connect, vacuum bellows, manual flapper valve and stainless steel flange, vacuum gauge |
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Warranty |
One-year warranty period, lifetime maintenance, (excluding related consumables, such as furnace tubes, seals,heating element etc.) |
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Certificates:SGS,ISO&UL |
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Standard Package Accessories: |
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Electric Furnace |
1 set |
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High temperature gloves |
1 pair |
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Stainless steel flange |
1 set |
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Crucible hook |
1 pc |
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Tube stopper |
2pcs |
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User manual |
1 book |
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Gas mixed system |
1 set |
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Please let me know your address in details,then we can send freight cost to you.
IPv6 network supported 