Equipment model number

Powder Magnetron Sputtering Instrument VTC-16-SM-PW

Product characteristics

- Surface coating of powder materials: magnetron sputtering, the powder material rolls over on the vibrating sample table during sputtering to achieve uniform coating of the powder surface;

- The device is compact and can be used in a glove box (with a KF40 feedthrough when ordering) to handle oxygen-sensitive materials.

- Vacuum and atmosphere can be applied

- PLC-integrated control system

- Quartz chamber, plasma magnetron sputtering target head, target sputtering baffle are standard.

Basic parameters

- Power supply: AC 220V 50/60Hz

- Sputtering current: 0-130mA

- Power: <1KW

- Output voltage: DC 700V

- Sputtering time: <15min

Magnetron sputtering head

- 2-inch magnetron sputter head (with water-cooled jacket), with 1-inch target head option;

- Connected to the vacuum chamber using quick connectors.

Target materials

- Suitable for sputtering gold, silver, aluminum, copper and other metals, less damage to the substrate and substrate temperature rise.

- A copper target, φ2″*3mm, comes standard.

- Target size requirements: φ2″×(0.1-5)mm thickness

Sputter chambers

- Chamber size: OD 166mm x ID 150mm x H 290mm, made of high purity quartz;

- Sealing flange: made of metal aluminum, sealed by fluorine rubber sealing ring;

- A manually operable baffle is mounted on the flange cover for target pre-sputtering. A φ6.35 ferrule fitting is the air inlet for connecting the air inlet pipe. A manually operated bleeder valve is used to fill air inside the quartz chamber.

-A stainless steel mesh covers the entire quartz chamber to shield the plasma.

- The flow rate of the working gas into the quartz chamber is controlled by the micro-precision regulator valve on the right side of the housing, thus regulating the vacuum level inside the chamber.

- The sputtering current is controlled by the potentiometer on the right side of the housing.

Vibrating sample stage

- Vibrating sample stage mounted on the bottom of the vacuum chamber

- Dimensions: diameter Φ2" (50.8mm)

- Vibration motor speed: 400-3000r/min adjustable

- Vibrating motor working time per time ≤15min (<2000r/min), <10min (2000-3000r/min)

- Maximum amount of powder sputtered per sample stage: 2g (aluminum oxide powder)

- Powder granularity range: between 1μm and 1mm

Control panel

- 4″PLC integrated touch screen control panel, which can display vacuum, current, sample sputtering time and so on.

· The data logging function can record process parameters such as vacuum, current and sputtering time for each sputtering, which is convenient for customers to inquire.

Pirani vacuum gauge

- The unit comes standard with a Pirani vacuum gauge

- Measuring range: 1*10-4 mbar-1000 mbar (1*10-4-750 torr)

- Accuracy: 1000 mbar-20 mbar (30% of reading)

                  20-0.002 mbar (2% of reading)

- Repeatability: 20-0.002 mbar (2% of reading)

- Operating humidity: ≤80% at 30°C ambient ≤50% at 40°C ambient No condensing gas;

- Use of temperature: 5 ℃ -60 ℃

- Optional higher precision digital display anti-corrosion vacuum gauge

Vacuum system (optional)

- Model: VRD-8       

- Pumping rate: 2.2 L/S

- Motor power: 370 W

- Limit pressure: 5×10-1 Pa (without load)

- Actual pressure: ≤5 Pa (20 min. with mechanical pump in cold state)

- If you want to get higher vacuum (10-5toor better), you can choose domestic or imported high vacuum unit.

Water cooling equipment (optional)

- Model: KJ-5000

- Working current: 1.4-2.1A

- Cooling capacity: 2361Btu/h

- Dimensions: 55 × 28 × 43cm (L × W × H)

- Water tank capacity: 6L

- Water flow rate: 16L/min

Equipment external dimensions

-600mm (L)*370mm (W)*830mm (H)

Weight

About 30KG

Warranty

One year warranty, lifetime maintenance (not including seals and other wear parts)

Precautions

- The air pressure inside the chamber must not be higher than 0.02MPa (relative air pressure);

- Due to the high air pressure inside the cylinder, so to the quartz tube into the gas, the cylinder must be installed on the pressure reducing valve, in order to ensure safety, it is recommended that the use of pressure lower than 0.02MPa, it is recommended that the company to buy a pressure reducing valve, the company's pressure reducing valve range of 0.01MPa-0.1MPa, the use of the more accurate and safe;

- We do not recommend the use of flammable, explosive and toxic gases, if customers do need to use flammable, explosive and toxic gases for technological reasons, please do a good job on your own protection and explosion-proof measures. We are not responsible for any problems caused by the use of flammable, explosive and toxic gases.

Items

Requirements

Provider 

Remark

Electricity

Power supply

Single-phase AC 220V±10%, frequency 50/60HZ, power 1500W

Customer offer

New National Standard Plug Board

Need to prepare a single-phase voltage AC 220V 50HZ, the maximum current 10A plug board

Customer offer

Grounding

Ground wire with resistance less than 4Ω

Customer offer

Gas supply

Please prepare a bottle of 40 liters of working gas, the gas cylinder port please match the corresponding pressure reducing valve

Customer offer

Vacuum system

Preparation of vacuum system (with suction hose or bellows, KF25 clamps, manual flapper valve)

Customer options

Water cooling equipment

The equipment needs to be connected to water cooling when working, a water cooler is needed.

Customer options